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Ultra-High Vacuum, High Cleanliness, High Reliability
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The Supermag® SCT Maglev Turbomolecular Pumps utilizes advanced magnetic levitation bearing technology to achieve complete non-contact levitation of the rotor. This results in no mechanical friction, no lubricating oil, high cleanliness, reliable operation, and low vibration. It is capable of creating ultra-high vacuum environments and is widely used in the semiconductor and related industries, including wafer fabrication, etching, thin film deposition, ion implantation, research, and photovoltaics.
Product Highlights
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Product Highlights
Achieves Ultimate Vacuum of 10-7 Pa to 10-8 Pa
Rotor capable of operating at very high speeds.
Controller And Pump Available in Both Separate and Integrated Configurations
Intelligent control software with remote tuning support.
Oil-Free and Frictionless, High Cleanliness
Designed with magnetic levitation technology minimizes bearing friction and eliminates the need for lubricating oil or grease
Low Maintenance Costs, Long Lifespan
Clean and wear-free, ensuring a long operational life
Low Noise, Low Vibration
High reliability in operation
Safety and Reliability
Intelligent monitoring of pump operational data ensures long-term operational safety
SCT Maglev Turbomolecular Pump
Parameters and Features
Documents
SCT Maglev Turbomolecular Pumps_Leaflet
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